Nanotechnology
2D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target Erosion

Ali J. Addie; Raid A. Ismail; Mudhafar A. Mohammed

Volume 2, Issue 4 , December 2022, , Page 118-127

https://doi.org/10.53293/jasn.2022.5395.1185

Abstract
  In this work, a simulation analysis of a commercial magnetron sputtering source was performed using the finite element method Particle-in-Cell/Monte Carlo Collision (PIC/MCC) to optimize the configuration of the Zn-C mosaic target. The magnetic field distribution was solved in a two-dimensional cylindrical ...  Read More ...