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  2. Volume 2, Issue 4
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Online ISSN: 2788-6867

Volume2, Issue4

2D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target Erosion

    Ali J. Addie Raid A. Ismail Mudhafar A. Mohammed

Journal of Applied Sciences and Nanotechnology, 2022, Volume 2, Issue 4, Pages 118-127
10.53293/jasn.2022.5395.1185

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Abstract

In this work, a simulation analysis of a commercial magnetron sputtering source was performed using the finite element method Particle-in-Cell/Monte Carlo Collision (PIC/MCC) to optimize the configuration of the Zn-C mosaic target. The magnetic field distribution was solved in a two-dimensional cylindrical coordinate system, and particles such as electrons, atoms, and charged ions of argon, zinc, and carbon were tracked in a DC magnetron sputtering system. The sputtering yield profile and particle flux for the eroded target were studied considering the ion and electron density distributions. The maximum sputtering flux of zinc and carbon was 1.975´1021 m-2.s-1 and 3.7´1018 m-2.s-1 respectively. The erosion position of a target was predicted based on the maximum power density distribution at the surface of the target. The accuracy of the simulation was checked by comparing it with the measurement of the target eroded after several hours of sputtering. However, as for the Zn-C mosaic target, the racetrack was identical to the analysis predicted by the numerical simulation process. The results of this work can be used as a guide for designing mosaic targets and optimizing their use for fabricating nanohybrid thin film structures.
Keywords:
    Mosaic targe erosion PIC/MCC analysis Magnetron spurting simulation Nanohybrid thin films
Main Subjects:
  • Nanotechnology
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(2022). 2D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target Erosion. Journal of Applied Sciences and Nanotechnology, 2(4), 118-127. doi: 10.53293/jasn.2022.5395.1185
Ali J. Addie; Raid A. Ismail; Mudhafar A. Mohammed. "2D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target Erosion". Journal of Applied Sciences and Nanotechnology, 2, 4, 2022, 118-127. doi: 10.53293/jasn.2022.5395.1185
(2022). '2D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target Erosion', Journal of Applied Sciences and Nanotechnology, 2(4), pp. 118-127. doi: 10.53293/jasn.2022.5395.1185
2D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target Erosion. Journal of Applied Sciences and Nanotechnology, 2022; 2(4): 118-127. doi: 10.53293/jasn.2022.5395.1185
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Journal Information

Publisher: University of Technology - IRAQ

Email:  jasn@uotechnology.edu.iq

Editor-in-chief: Prof. Dr. Adawiya J. Haider

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Applied Sciences and Nanotechnology (JASN)

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